M. Pavlin, D. Belavic, F. Novak.
Ceramic MEMS designed for wireless pressure monitoring in the industrial environment.
Sensors, Vol. 12, No. 1, 2012, pp. 320-333.
This paper presents the design of a wireless pressure-monitoring system for
harsh-environment applications. Two types of ceramic pressure sensors made with a
low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive
strain gauge pressure sensor. The second type is a capacitive pressure sensor, which is
based on changes of the capacitance values between two electrodes: one electrode is fixed
and the other is movable under an applied pressure. The design was primarily focused
on low power consumption. Reliable operation in the presence of disturbances, like
electromagnetic interference, parasitic capacitances, etc., proved to be contradictory
constraints. A piezoresistive ceramic pressure sensor with a high bridge impedance was
chosen for use in a wireless pressure-monitoring system and an acceptable solution using
energy-harvesting techniques has been achieved. The described solution allows for the
integration of a sensor element with an energy harvester that has a printed thick-film
battery and complete electronics in a single substrate packaged inside a compact housing.